ASYS / Amtech Systems, Inc. - Pengajuan SECLaporan Tahunan, Pernyataan Proksi

Amtech Reports Third Quarter Fiscal 2025 Results

EXHIBIT 99.1 Amtech Reports Third Quarter Fiscal 2025 Results TEMPE, Ariz., August 6, 2025 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of equipment and consumables for semiconductor fabrication and packaging, today reported results for its third quarter ended June 30, 2025. Third Quarter Fiscal 2025 Financial and Operational Results: • Net revenue of $19.6 million • Cash of $1

FORM 8-K Item 2.02 Results of Operations and Financial Condition.

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 06, 2025 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission Fil

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: June 30, 2025 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYST

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD SPECIALIZED DISCLOSURE REPORT AMTECH SYSTEMS, INC. (Exact name of the registrant as specified in its charter)

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD SPECIALIZED DISCLOSURE REPORT AMTECH SYSTEMS, INC. (Exact name of the registrant as specified in its charter) Arizona 000-11412 86-0411215 (State or other jurisdiction of incorporation) (Commission file number) (IRS Employer Identification No.) 58 South River Drive Suite 370, Tempe, Arizona 85288 (Address of principal

Conflict Minerals Report for the reporting period from January 1, 2024 to December 31, 2024 as required by Items 1.01 and 1.02 of this Form SD.

Exhibit 1.01 Conflict Minerals Report For Reporting Period from January 1, 2024 to December 31, 2024 1. Introduction This Conflict Minerals Report (this “Report”) of Amtech Systems, Inc. (the “Company”, “Amtech”, “our”, “us”, or “we”) has been prepared pursuant to Rule 13p-1 and Form SD (the “Rule”) promulgated under the Securities Exchange Act of 1934, as amended, for the reporting period from Ja

Amtech Reports Second Quarter Fiscal 2025 Results

EXHIBIT 99.1 Amtech Reports Second Quarter Fiscal 2025 Results TEMPE, Ariz., May 12, 2025 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of equipment and consumables for semiconductor fabrication and packaging, today reported results for its second quarter ended March 31, 2025. Second Quarter Fiscal 2025 Financial and Operational Results: • Net revenue of $15.6 million • Cash of

FORM 8-K Item 2.02 Results of Operations and Financial Condition.

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 12, 2025 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File N

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: March 31, 2025 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYS

Amtech Provides Second Quarter Fiscal 2025 Financial Guidance Update

EXHIBIT 99.1 Amtech Provides Second Quarter Fiscal 2025 Financial Guidance Update TEMPE, Ariz., April 9, 2025 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of equipment and consumables for semiconductor fabrication and packaging, provided a business update for the second quarter which ended on March 31st, 2025. Amtech’s Thermal Processing Solutions Segment experienced a customer

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): April 09, 2025 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

FIRST Amendment to the amtech systems, inc. 2022 equity INCENTIVE Plan

Exhibit 99.2 FIRST Amendment to the amtech systems, inc. 2022 equity INCENTIVE Plan WHEREAS, Amtech Systems, Inc. (the “Company”) maintains the 2022 Equity Incentive Plan of Amtech Systems, Inc. (the “Plan”); and WHEREAS, Section 15 of the Plan provides that the Plan may be amended from time to time; and WHEREAS, the Company desires to amend the Plan in certain respects; NOW, THEREFORE, the Plan i

Filing Fee Table

Exhibit 107 Calculation of Filing Fee Table Form S-8 (Form Type) Amtech Systems, Inc.

As filed with the Securities and Exchange Commission on March 19, 2025

As filed with the Securities and Exchange Commission on March 19, 2025 Registration No.

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 05, 2025 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. )

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ☑ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (a

SCHEDULE A Transactions Reported in Item 5(c)

SCHEDULE A Transactions Reported in Item 5(c) Reporting Person Trade Date Shares Purchased (Sold) Weighted Average Price Per Share ($)* Maximum Price ($) Minimum Price ($) Robert Averick 02/13/2025 22,000 4.

Amtech Reports First Quarter Fiscal 2025 Results

EXHIBIT 99.1 Amtech Reports First Quarter Fiscal 2025 Results TEMPE, Ariz., February 5, 2025 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of equipment and consumables for semiconductor fabrication and packaging, today reported results for its first quarter ended December 31, 2024. First Quarter Fiscal 2025 Financial and Operational Results: • Net revenue of $24.4 million • Cash

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 05, 2025 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission F

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: December 31, 2024 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. )

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ☑ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (a

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 23, 2025 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission Fi

Powers of Attorney

Exhibit 24 POWER OF ATTORNEY KNOW ALL MEN BY THESE PRESENTS, THAT EACH PERSON WHOSE SIGNATURE APPEARS BELOW CONSTITUTES AND APPOINTS ROBERT C.

Amendment No. 1 to Employee Agreement between Amtech Systems, Inc. and Robert C. Daigle, dated effective as of February 29, 2024

Exhibit 10.5 AMENDMENT NO. 1 TO EMPLOYMENT AGREEMENT THIS AMENDMENT NO. 1 TO EMPLOYMENT AGREEMENT (this “Amendment No. 1”), by and between Amtech Systems, Inc., an Arizona corporation (the “Company”), and Robert C. Daigle (“Executive”), is entered into and effective as of the 29th day of February, 2024 (the “First Amendment Effective Date”). WHEREAS, the Company and Executive entered into that cer

Description of Capital Stock

Exhibit 4.1 DESCRIPTION OF THE REGISTRANT’S SECURITIES REGISTERED PURSUANT TO SECTION 12 OF THE SECURITIES EXCHANGE ACT OF 1934 Amtech Systems, Inc. (“Amtech,” “we,” “our” or “us”) has one class of securities registered under Section 12 of the Securities Exchange Act of 1934, as amended: our common stock. DESCRIPTION OF CAPITAL STOCK The following summary of the terms of our capital stock is based

Subsidiaries of the Registrant

Exhibit 21.1 AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES SUBSIDIARIES OF THE REGISTRANT Name Jurisdiction in which incorporated Advanced Compound Materials, Inc. State of Delaware Bruce Technologies, Inc. State of Massachusetts BTU Europe Ltd. United Kingdom BTU International, Inc. State of Delaware BTU Ltd. (Shanghai) China BTU Overseas, Ltd. State of Delaware BTU Overseas (Shanghai) Co., Ltd. Chin

Amendment No. 2 to Employee Agreement between Amtech Systems, Inc. and Robert C. Daigle, dated effective as of August 6, 2024

Exhibit 10.6 AMENDMENT NO. 2 TO EMPLOYMENT AGREEMENT THIS AMENDMENT NO. 2 TO EMPLOYMENT AGREEMENT (this “Amendment No. 2”), by and between Amtech Systems, Inc., an Arizona corporation (the “Company”), and Robert C. Daigle (“Executive”), is entered into and effective as of the 29th day of February, 2024 (the “First Amendment Effective Date”). WHEREAS, the Company and Executive entered into that cer

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended: September 30, 2024 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number: 0-11412 AMTECH SYSTEMS

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): December 09, 2024 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission F

Amtech Reports Fourth Quarter and Year End Fiscal 2024 Results

EXHIBIT 99.1 Amtech Reports Fourth Quarter and Year End Fiscal 2024 Results TEMPE, Ariz., December 9, 2024 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of equipment and consumables for semiconductor fabrication and packaging, today reported results for its fourth quarter and fiscal year ended September 30, 2024. Fourth Quarter Fiscal 2024 Financial and Operational Results: • Ne

ASYS / Amtech Systems, Inc. / DIMENSIONAL FUND ADVISORS LP - SEC SCHEDULE 13G Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 6 )* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) September 30, 2024 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sc

Termination of a Material Definitive Agreement

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): September 11, 2024 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission

ASYS / Amtech Systems, Inc. / Wax Asset Management, LLC Passive Investment

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G (Rule 13d-102) INFORMATION TO BE INCLUDED IN STATEMENTS FILED PURSUANT TO RULE 13d-1(b), (c), AND (d) AND AMENDMENTS THERETO FILED PURSUANT TO RULE 13d-2(b) (AMENDMENT NO. 1)* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) August 31, 2024 (Date of Event Which Requires Fi

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 06, 2024 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission Fil

Amtech Systems Announces CFO Transition

EXHIBIT 99.2 Amtech Systems Announces CFO Transition TEMPE, Ariz., August 7, 2024 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of equipment and consumables for semiconductor fabrication and packaging, today announced that Lisa Gibbs has submitted her resignation as Chief Financial Officer and Board member, effective close of business on August 7, 2024, to assume an executive ro

Amtech Reports Third Quarter 2024 Results

EXHIBIT 99.1 Amtech Reports Third Quarter 2024 Results TEMPE, Ariz., August 7, 2024 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of equipment and consumables for semiconductor fabrication and packaging, today reported results for its third quarter ended June 30, 2024. Third Quarter Fiscal 2024 Financial and Operational Results: • Net revenue of $26.7 million • GAAP operating in

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: June 30, 2024 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYST

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD SPECIALIZED DISCLOSURE REPORT AMTECH SYSTEMS, INC. (Exact name of the registrant as specified in its charter)

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD SPECIALIZED DISCLOSURE REPORT AMTECH SYSTEMS, INC. (Exact name of the registrant as specified in its charter) Arizona 000-11412 86-0411215 (State or other jurisdiction of incorporation) (Commission file number) (IRS Employer Identification No.) 58 South River Drive Suite 370, Tempe, Arizona 85288 (Address of principal

Conflict Minerals Report for the reporting period from January 1, 2023 to December 31, 2023 as required by Items 1.01 and 1.02 of this Form SD.

Exhibit 1.01 Conflict Minerals Report For Reporting Period from January 1, 2023 to December 31, 2023 1. Introduction This Conflict Minerals Report (this “Report”) of Amtech Systems, Inc. (the “Company”, “Amtech”, “our”, “us”, or “we”) has been prepared pursuant to Rule 13p-1 and Form SD (the “Rule”) promulgated under the Securities Exchange Act of 1934, as amended, for the reporting period from Ja

ASYS / Amtech Systems, Inc. / PITON CAPITAL PARTNERS LLC - SC 13D/A Activist Investment

SC 13D/A 1 tm2414450-1sc13da.htm SC 13D/A UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13D Under the Securities Exchange Act of 1934 (Amendment No. 6)* AMTECH SYSTEMS, INC. (Name of Issuer) Common Stock, $0.01 Par Value Per Share (Title of Class of Securities) 032332504 (CUSIP Number) Garrett Lynam Kokino LLC 201 Tresser Boulevard, 3rd Floor Stamford, CT 06901 (

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 08, 2024 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File N

Amtech Reports Second Quarter 2024 Results

EXHIBIT 99.1 Amtech Reports Second Quarter 2024 Results TEMPE, Ariz., May 8, 2024 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of thermal processing, wafer cleaning and chemical mechanical polishing (CMP) capital equipment and related consumables used in semiconductor, advanced mobility and renewable energy manufacturing applications, today reported results for its second quart

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: March 31, 2024 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYS

Financial Statements and Exhibits, Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 06, 2024 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

Letter from Grant Thornton LLP, dated March 5, 2024

March 5, 2024 U.S. Securities and Exchange Commission Office of the Chief Accountant 100 F Street, NE Washington, DC 20549 Re: Amtech Systems, Inc. File No. 000-11412 Dear Sir or Madam: We have read Item 4.01 of Form 8-K of Amtech Systems, Inc. dated March 5, 2024, and agree with the statements concerning our Firm contained therein. Very truly yours, /s/ GRANT THORNTON LLP

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 01, 2024 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 29, 2024 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission F

ASYS / Amtech Systems, Inc. / Pacific Ridge Capital Partners, LLC - ASYS 13GA 2023 FILING Passive Investment

SC 13G/A 1 ASYS13Ga2023v5.htm ASYS 13GA 2023 FILING UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 5 )* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 31, 2023 (Date of Event which Requires Filing of this Statement) Check the appropriate

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: December 31, 2023 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH

ASYS / Amtech Systems, Inc. / DIMENSIONAL FUND ADVISORS LP - SEC SCHEDULE 13G Passive Investment

SC 13G/A 1 SEC13GFiling.htm SEC SCHEDULE 13G UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 5 )* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 29, 2023 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to

ASYS / Amtech Systems, Inc. / Wax Asset Management, LLC Passive Investment

SC 13G 1 fp0087120-1sc13g.htm SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G (Rule 13d-102) INFORMATION TO BE INCLUDED IN STATEMENTS FILED PURSUANT TO RULE 13d-1(b), (c), AND (d) AND AMENDMENTS THERETO FILED PURSUANT TO RULE 13d-2(b) (AMENDMENT NO. )* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 31, 2023 (

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 09, 2024 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission F

Amtech Systems, Inc. 131 South Clark Drive Tempe, AZ 85288

Amtech Systems, Inc. 131 South Clark Drive Tempe, AZ 85288 Via EDGAR February 9, 2024 U.S. Securities and Exchange Commission Division of Corporation Finance 100 F Street N.E. Mail Stop 3010CF/AD8 Washington, DC 20549 Attn: Eric McPhee Kristina Marrone Benjamin Holt Dorrie Yale Re: Amtech Systems, Inc. Form 10-K for the Fiscal Year Ended September 30, 2023 Filed December 14, 2023 File No. 000-1141

Amtech Reports First Quarter 2024 Results

EXHIBIT 99.1 Amtech Reports First Quarter 2024 Results TEMPE, Ariz., February 9, 2024 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of thermal processing, wafer cleaning and chemical mechanical polishing (CMP) capital equipment and related consumables used in semiconductor, advanced mobility and renewable energy manufacturing applications, today reported results for its first qu

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. )

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ☑ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (a

Clawback Policy

Exhibit 97 amtech systems, INC. Policy for RECOVERY OF ERRONEOUSLY AWARDED Incentive Compensation (Adopted September 26, 2023) 1. INTRODUCTION Amtech Systems, Inc. (the “Company”) is adopting this policy (this “Policy”) to provide for the Company’s recovery of certain Incentive Compensation (as defined below) erroneously awarded to Affected Officers (as defined below) under certain circumstances.

Powers of Attorney

Exhibit 24 POWER OF ATTORNEY KNOW ALL MEN BY THESE PRESENTS, THAT EACH PERSON WHOSE SIGNATURE APPEARS BELOW CONSTITUTES AND APPOINTS ROBERT C.

Amtech Reports Fourth Quarter and Year End Fiscal 2023 Results

EXHIBIT 99.1 Amtech Reports Fourth Quarter and Year End Fiscal 2023 Results TEMPE, Ariz., December 14, 2023 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of thermal processing, wafer cleaning and chemical mechanical polishing (CMP) capital equipment and related consumables used in semiconductor, advanced mobility and renewable energy manufacturing applications, today reported re

Description of Capital Stock

Exhibit 4.1 DESCRIPTION OF THE REGISTRANT’S SECURITIES REGISTERED PURSUANT TO SECTION 12 OF THE SECURITIES EXCHANGE ACT OF 1934 Amtech Systems, Inc. (“Amtech,” “we,” “our” or “us”) has one class of securities registered under Section 12 of the Securities Exchange Act of 1934, as amended: our common stock. DESCRIPTION OF CAPITAL STOCK The following summary of the terms of our capital stock is based

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended: September 30, 2023 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number: 0-11412 AMTECH SYSTEMS

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): December 14, 2023 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission F

Subsidiaries of the Registrant

Exhibit 21.1 AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES SUBSIDIARIES OF THE REGISTRANT Name Jurisdiction in which incorporated Advanced Compound Materials, Inc State of Delaware Bruce Technologies, Inc State of Massachusetts BTU Europe Ltd. United Kingdom BTU International, Inc. State of Delaware BTU Ltd. (Shanghai) China BTU Overseas, Ltd. State of Delaware BTU Overseas (Shanghai) Co., Ltd. China

Employment Agreement between Amtech Systems, Inc. and Robert C. Daigle, dated August 14, 2023*

Exhibit 10.4 EMPLOYMENT AGREEMENT THIS EMPLOYMENT AGREEMENT (this “Agreement”), by and between Amtech Systems, Inc., an Arizona corporation (the “Company”), and Robert C. Daigle (“Executive”) is entered into and effective as of the 14th day of August, 2023 (the “Effective Date”). WHEREAS, the Company and Executive wish to provide for terms and conditions of Executive’s employment with the Company,

Loan and Security Agreement, dated as of January 17, 2023, by and among the Registrant, its U.S. based wholly owned subsidiaries Bruce Technologies, Inc., a Massachusetts corporation, BTU International, Inc., a Delaware corporation, Intersurface Dynamics, Incorporated, a Connecticut corporation, P.R. Hoffman Machine Products, Inc., an Arizona corporation, Entrepix, Inc., an Arizona corporation, and Advanced Compound Materials, Inc., a Delaware corporation, as borrowers, and UMB Bank, N.A., national banking association, as lender.

Exhibit 10.8 Certain confidential information contained in this document, marked by brackets, has been omitted because it is both (i) not material and (ii) would be competitively harmful if publicly disclosed. LOAN AND SECURITY AGREEMENT This LOAN AND SECURITY AGREEMENT dated as of January 17, 2023 (the “Agreement”), is executed by and among AMTECH SYSTEMS, INC., an Arizona corporation (the “Paren

Forbearance & Modification Agreement entered into effective as of December 5, 2023 by and between the Registrant, its U.S. based wholly owned subsidiaries Bruce Technologies, Inc., a Massachusetts corporation, BTU International, Inc., a Delaware corporation, Intersurface Dynamics, Incorporated, a Connecticut corporation, P.R. Hoffman Machine Products, Inc., an Arizona corporation, Entrepix, Inc., an Arizona corporation, and Advanced Compound Materials, Inc., a Delaware corporation, as borrowers, and UMB Bank, N.A., national banking association, as lender.

Exhibit 10.7 FORBEARANCE & MODIFICATION AGREEMENT THIS FORBEARANCE & MODIFICATION AGREEMENT (“Agreement”) is entered into effective as of December 5, 2023 (“Forbearance Effective Date”) by and between Amtech Systems, Inc., an Arizona corporation (“Amtech”), Bruce Technologies, Inc., a Massachusetts corporation (“Bruce”), BTU International, Inc., a Delaware corporation (“BTU”), Intersurface Dynamic

Amtech Fourth Quarter Fiscal 2023 Business Update

EXHIBIT 99.1 Amtech Fourth Quarter Fiscal 2023 Business Update TEMPE, Ariz., December 13, 2023 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of thermal processing, wafer cleaning and chemical mechanical polishing (CMP) capital equipment and related consumables used in semiconductor, advanced mobility and renewable energy manufacturing applications, today announced a summary of i

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): December 13, 2023 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission F

Entry into a Material Definitive Agreement

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): December 05, 2023 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission F

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K/A CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K/A CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 08, 2023 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission F

Amtech Reports Third Quarter Fiscal 2023 Results

EXHIBIT 99.1 Amtech Reports Third Quarter Fiscal 2023 Results TEMPE, Ariz., August 9, 2023 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power, analog and discrete devices, and electronic assemblies a

Amtech Systems Announces CEO Transition

Exhibit 99.2 Amtech Systems Announces CEO Transition TEMPE, Ariz., August 9, 2023 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power, analog and discrete devices, and electronic assemblies and module

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: June 30, 2023 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYST

Regulation FD Disclosure, Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 08, 2023 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission Fil

Conflict Minerals Report for the reporting period from January 1, 2022 to December 31, 2022 as required by Items 1.01 and 1.02 of this Form SD.

Exhibit 1.01 Conflict Minerals Report For Reporting Period from January 1, 2022 to December 31, 2022 1. Introduction This Conflict Minerals Report (this “Report”) of Amtech Systems, Inc. (the “Company”, “Amtech”, “our”, “us”, or “we”) has been prepared pursuant to Rule 13p-1 and Form SD (the “Rule”) promulgated under the Securities Exchange Act of 1934, as amended, for the reporting period from Ja

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD SPECIALIZED DISCLOSURE REPORT AMTECH SYSTEMS, INC. (Exact name of the registrant as specified in its charter)

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD SPECIALIZED DISCLOSURE REPORT AMTECH SYSTEMS, INC. (Exact name of the registrant as specified in its charter) Arizona 000-11412 86-0411215 (State or other jurisdiction of incorporation) (Commission file number) (IRS Employer Identification No.) 131 S. Clark Drive, Tempe, Arizona 85288 (Address of principal executive of

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: March 31, 2023 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYS

Amtech Reports Second Quarter Fiscal 2023 Results

EXHIBIT 99.1 Amtech Reports Second Quarter Fiscal 2023 Results TEMPE, Ariz., May 10, 2023 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power, analog and discrete devices, and electronic assemblies an

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 10, 2023 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File N

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K/A CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K/A CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 17, 2023 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission

AMTECH SYSTEMS, INC. UNAUDITED PRO FORMA COMBINED FINANCIAL STATEMENTS

Exhibit 99.3 AMTECH SYSTEMS, INC. UNAUDITED PRO FORMA COMBINED FINANCIAL STATEMENTS On January 17, 2023 (the “Closing” or “Closing Date”), Amtech Systems, Inc., an Arizona corporation (the “Company”, “Amtech” “we” or “us”) completed the acquisition of Entrepix, Inc., an Arizona corporation (“Entrepix”), through a reverse triangular merger. Pursuant to the terms and conditions of the Agreement and

ENTREPIX, INC. AND SUBSIDIARIES CONSOLIDATED FINANCIAL STATEMENTS Period Ended November 30, 2022 ENTREPIX, INC. AND SUBSIDIARIES CONSOLIDATED FINANCIAL STATEMENT Period Ended November 30, 2022

Exhibit 99.2 ENTREPIX, INC. AND SUBSIDIARIES CONSOLIDATED FINANCIAL STATEMENTS Period Ended November 30, 2022 ENTREPIX, INC. AND SUBSIDIARIES CONSOLIDATED FINANCIAL STATEMENT Period Ended November 30, 2022 CONTENTS Pages CONSOLIDATED FINANCIAL STATEMENTS Consolidated Balance Sheet 2 Consolidated Statement of Comprehensive Income 3 Consolidated Statement of Stockholders’ Equity 4 Consolidated State

ENTREPIX, INC. AND SUBSIDIARIES CONSOLIDATED FINANCIAL STATEMENTS Year Ended February 28, 2022 ENTREPIX, INC. AND SUBSIDIARIES CONSOLIDATED FINANCIAL STATEMENTS Year Ended February 28, 2022

Exhibit 99.1 ENTREPIX, INC. AND SUBSIDIARIES CONSOLIDATED FINANCIAL STATEMENTS Year Ended February 28, 2022 ENTREPIX, INC. AND SUBSIDIARIES CONSOLIDATED FINANCIAL STATEMENTS Year Ended February 28, 2022 CONTENTS Pages INDEPENDENT AUDITORS’ REPORT 1 - 2 CONSOLIDATED FINANCIAL STATEMENTS Consolidated Balance Sheet 3 Consolidated Statement of Comprehensive Income 4 Consolidated Statement of Stockhold

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 01, 2023 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

ASYS / Amtech Systems, Inc. / Pacific Ridge Capital Partners, LLC - ASYS 13GA FILING Passive Investment

SC 13G/A 1 ASYS13Ga2022v4.htm ASYS 13GA FILING UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 4 )* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 31, 2022 (Date of Event which Requires Filing of this Statement) Check the appropriate box t

ASYS / Amtech Systems, Inc. / DIMENSIONAL FUND ADVISORS LP - SEC SCHEDULE 13G Passive Investment

SC 13G/A 1 SEC13GFiling.htm SEC SCHEDULE 13G UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 4 )* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 30, 2022 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to

Financial Statements and Exhibits, Results of Operations and Financial Condition, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 07, 2023 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission F

Amtech Reports First Quarter Fiscal 2023 Results

EXHIBIT 99.1 Amtech Reports First Quarter Fiscal 2023 Results TEMPE, Ariz., February 8, 2023 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power, analog and discrete devices, and electronic assemblies

Loan and Security Agreement, dated as of January 17, 2023, by and among the Registrant, its U.S. based wholly owned subsidiaries Bruce Technologies, Inc., a Massachusetts corporation, BTU International, Inc., a Delaware corporation, Intersurface Dynamics, Incorporated, a Connecticut corporation, P.R. Hoffman Machine Products, Inc., an Arizona corporation, and Entrepix, Inc., an Arizona corporation, as borrowers, and UMB Bank, N.A., national banking association, as lender.

Exhibit 10.2 LOAN AND SECURITY AGREEMENT This LOAN AND SECURITY AGREEMENT dated as of January 17, 2023 (the “Agreement”), is executed by and among AMTECH SYSTEMS, INC., an Arizona corporation (the “Parent Borrower”), BRUCE TECHNOLOGIES, INC., a Massachusetts corporation, BTU INTERNATIONAL, INC., a Delaware corporation, INTERSURFACE DYNAMICS, INC., a Connecticut corporation, P.R. HOFFMAN MACHINE PR

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: December 31, 2022 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH

Agreement and Plan of Merger, dated January 17, 2023, by and among the Registrant, Emerald Merger Sub, Inc., an Arizona corporation and wholly owned subsidiary of the Registrant, Entrepix, Inc., an Arizona corporation, Timothy P. Tobin, solely in his capacity as the shareholders’ representative, and the Key Shareholders (as defined in the Agreement and Plan of Merger).

Exhibit 10.1 AGREEMENT AND PLAN OF MERGER by and among AMTECH SYSTEMS, INC., ENTREPIX, INC., EMERALD MERGER SUB, INC., TIMOTHY P. TOBIN, as the Shareholders’ Representative and TIMOTHY P. TOBIN and STEVEN N. HOROWITZ, as the Key Shareholders dated as of January 17, 2023 TABLE OF CONTENTS Page ARTICLE I THE MERGER 1 1.01 The Merger 1 1.02 Filing of Statement of Merger; Effective Time 2 1.03 Effect

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. )

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ☑ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (a

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 13, 2023 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission Fi

Amtech Systems Acquires Entrepix, Inc., a Globally Recognized Expert in CMP and Wafer Cleaning

EX-99.1 2 asys-ex991.htm EX-99.1 EXHIBIT 99.1 Amtech Systems Acquires Entrepix, Inc., a Globally Recognized Expert in CMP and Wafer Cleaning TEMPE, Ariz., January 17, 2023 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), announced today the acquisition of Entrepix, Inc., a globally recognized expert in chemical mechanical polishing (CMP) and wafer cleaning. Entrepix is expected to expand Amtech

Regulation FD Disclosure, Entry into a Material Definitive Agreement, Financial Statements and Exhibits, Creation of a Direct Financial Obligation or an Obligation under an Off-Balance Sheet Arrangement of a Registrant, Completion of Acquisition or Disposition of Assets

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 17, 2023 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission Fi

Safe Harbor Statement This Presentation may contain certain statements or information that constitute “forward-looking statements” (as such term is defined in Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Ex

Entrepix acquisition overview JANUARY 2023 Exhibit 99.2 Safe Harbor Statement This Presentation may contain certain statements or information that constitute “forward-looking statements” (as such term is defined in Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, and the Private Securities Litigation Reform Act of 1995). In

Amtech Reports Fourth Quarter and Fiscal 2022 Results

EXHIBIT 99.1 Amtech Reports Fourth Quarter and Fiscal 2022 Results TEMPE, Ariz., November 30, 2022 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power devices, analog and discrete devices, electronic

Description of Capital Stock

Exhibit 4.1 DESCRIPTION OF THE REGISTRANT?S SECURITIES REGISTERED PURSUANT TO SECTION 12 OF THE SECURITIES EXCHANGE ACT OF 1934 Amtech Systems, Inc. (?Amtech,? ?we,? ?our? or ?us?) has one class of securities registered under Section 12 of the Securities Exchange Act of 1934, as amended: our common stock. DESCRIPTION OF CAPITAL STOCK The following summary of the terms of our capital stock is based

Powers of Attorney

Exhibit 24 POWER OF ATTORNEY KNOW ALL MEN BY THESE PRESENTS, THAT EACH PERSON WHOSE SIGNATURE APPEARS BELOW CONSTITUTES AND APPOINTS MICHAEL WHANG AND LISA D.

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) ? ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended: September 30, 2022 OR ? TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number: 0-11412 AMTECH SYSTEMS

Jong S. Whang Separation Agreement*

Certain confidential information contained in this document, marked by brackets, has been omitted because it is both (i) not material and (ii) would be competitively harmful is publicly disclosed.

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 30, 2022 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission F

Subsidiaries of the Registrant

Exhibit 21.1 AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES SUBSIDIARIES OF THE REGISTRANT Name Jurisdiction in which incorporated Bruce Technologies, Inc State of Massachusetts BTU Europe Ltd. United Kingdom BTU International, Inc. State of Delaware BTU Ltd. (Shanghai) China BTU Overseas, Ltd. State of Delaware BTU Overseas (Shanghai) Co., Ltd. China Intersurface Dynamics, Inc. State of Connecticut P.

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 24, 2022 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission Fil

First Amendment to Purchase Agreement dated June 22, 2022, between BTU International, Inc. and MCP III 23 Esquire LLC

Exhibit 10.2 FIRST AMENDMENT TO PURCHASE AGREEMENT This FIRST AMENDMENT TO PURCHASE AGREEMENT (“Amendment”) is made as of June 22, 2022 (“Amendment Date”) by and between BTU INTERNATIONAL, INC., a Delaware corporation (“Seller”) and MCP III 23 ESQUIRE LLC, a Delaware limited liability company (“Buyer”). RECITALS A. Seller and Rhino Capital Advisors LLC, a Massachusetts limited liability company, a

Cancellation of Certificate of Designations, Preferences and Privileges of Series A Convertible Preferred Stock of Amtech Systems, Inc., dated as of August 12, 2022

Exhibit 3.1 CANCELLATION OF CERTIFICATE OF DESIGNATIONS, PREFERENCES AND PRIVILEGES of the SERIES A CONVERTIBLE PREFERRED STOCK (Par Value $.01 Per Share) of AMTECH SYSTEMS, INC. Pursuant to Section 10-602 of the Arizona Business Corporation Act The undersigned duly authorized officer of Amtech Systems, Inc. (the ?Corporation?), a corporation organized and existing under the Arizona Business Corpo

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: June 30, 2022 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYST

Amtech Reports Third Quarter Fiscal 2022 Results

EXHIBIT 99.1 Amtech Reports Third Quarter Fiscal 2022 Results TEMPE, Ariz., August 15, 2022 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power devices, analog and discrete devices, electronic assembl

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Amendments to Articles of Incorporation or Bylaws; Change in Fiscal Year, Entry into a Material Definitive Agreement, Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 9, 2022 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

Purchase and Sale Agreement dated April 15, 2022, between BTU International, Inc. and Rhino Capital Advisors LLC

Exhibit 10.1 Certain material (indicated by three asterisks in brackets [***]) has been omitted from this document because it is both (1) not material and (2) would be competitively harmful if publicly disclosed PURCHASE AND SALE AGREEMENT THIS PURCHASE AND SALE AGREEMENT (“Agreement”), dated as of April 15, 2022 (the “Effective Date”) is between BTU INTERNATIONAL, INC., a Delaware corporation, wi

Conflict Minerals Report for the reporting period from January 1, 2021 to December 31, 2021 as required by Items 1.01 and 1.02 of this Form SD.

EX-1.01 2 asys-ex101.htm EX-1.01 Exhibit 1.01 Conflict Minerals Report For Reporting Period from January 1, 2021 to December 31, 2021 1. Introduction This Conflict Minerals Report (this “Report”) of Amtech Systems, Inc. (the “Company”, “Amtech”, “our”, “us”, or “we”) has been prepared pursuant to Rule 13p-1 and Form SD (the “Rule”) promulgated under the Securities Exchange Act of 1934, as amended,

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD SPECIALIZED DISCLOSURE REPORT AMTECH SYSTEMS, INC. (Exact name of the registrant as specified in its charter)

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD SPECIALIZED DISCLOSURE REPORT AMTECH SYSTEMS, INC. (Exact name of the registrant as specified in its charter) Arizona 000-11412 86-0411215 (State or other jurisdiction of incorporation or organization) (Commission File Number) (IRS Employer Identification No.) 131 S. Clark Drive, Tempe, Arizona 85281 (Address of princi

Amtech Reports Second Quarter Fiscal 2022 Results

EXHIBIT 99.1 Amtech Reports Second Quarter Fiscal 2022 Results TEMPE, Ariz., May 11, 2022 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power devices, analog and discrete devices, electronic assemblie

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: March 31, 2022 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYS

Financial Statements and Exhibits, Results of Operations and Financial Condition, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 11, 2022 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File N

Entry into a Material Definitive Agreement

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): April 22, 2022 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

Filing Fee Table

Exhibit 107 Calculation of Filing Fee Table Form S-8 (Form Type) Amtech Systems, Inc.

Amtech Systems, Inc. 2022 Equity Incentive Plan*

Exhibit 99.1 AMTECH SYSTEMS, INC. 2022 EQUITY INCENTIVE PLAN 1.Purpose. The purpose of the Amtech Systems, Inc. 2022 Equity Incentive Plan (the ?Plan?) is to enable the Company and any Affiliates to attract, retain and motivate their officers and other key employees, and to further align the interests of such persons with those of the stockholders of the Company by providing for or increasing the

As filed with the Securities and Exchange Commission on March 25, 2022

As filed with the Securities and Exchange Commission on March 25, 2022 Registration No.

Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 02, 2022 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

ASYS / Amtech Systems, Inc. / PITON CAPITAL PARTNERS LLC - SC 13D/A Activist Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13D Under the Securities Exchange Act of 1934 (Amendment No. 5)* AMTECH SYSTEMS, INC. (Name of Issuer) Common Stock, $0.01 Par Value Per Share (Title of Class of Securities) 032332504 (CUSIP Number) Garrett Lynam Kokino LLC 201 Tresser Boulevard, 3rd Floor Stamford, CT 06901 (203) 595-4552 (Name, Address and Telephone

Financial Statements and Exhibits, Results of Operations and Financial Condition, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 10, 2022 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission F

ASYS / Amtech Systems, Inc. / Pacific Ridge Capital Partners, LLC - ASYS 2021 SC13GA Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 3 )* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 31, 2021 (Date of Event which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sch

Amtech Reports First Quarter Fiscal 2022 Results

EXHIBIT 99.1 Amtech Reports First Quarter Fiscal 2022 Results TEMPE, Ariz., February 14, 2022 - Amtech Systems, Inc. ("Amtech") (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power devices, analog and discrete devices, electronic assem

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ? QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: December 31, 2021 OR ? TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH

ASYS / Amtech Systems, Inc. / VANGUARD GROUP INC - SCHEDULE 13G/A Passive Investment

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 1)* Name of issuer: Amtech Systems Inc. Title of Class of Securities: Common Stock CUSIP Number: 032332504 Date of Event Which Requires Filing of this Statement: December 31, 2021 Check the appropriate box to designate the rule pursuant to which this Schedule is filed: ☒

ASYS / Amtech Systems, Inc. / DIMENSIONAL FUND ADVISORS LP - SEC SCHEDULE 13G Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 3 )* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 31, 2021 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sch

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. )

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ? Filed by a Party other than the Registrant ? Check the appropriate box: ? Preliminary Proxy Statement ? Confidential, for Use of the Commission Only (a

Letter from Mayer Hoffman McCann P.C., dated November 19, 2021

EX-16.1 3 asys-ex161.htm EX-16.1 Exhibit 16.1 November 19, 2021 Securities and Exchange Commission 100 F Street N.E. Washington, D.C. 20549 Commissioners: We have read item 4.01 of Amtech Systems, Inc.’s Form 8-K dated November 19, 2021, and we agree with the statements set forth in Item 4.01, insofar as they relate to our firm. With respect to all other matters, we have no basis to agree or disag

Amendments to Articles of Incorporation or Bylaws; Change in Fiscal Year, Financial Statements and Exhibits, Changes in Registrant's Certifying Accountant

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 16, 2021 Amtech Systems, Inc. (Exact name of registrant as specified in its charter) Arizona 000-11412 86-0411215 (State or other jurisdiction of incorporation) (Commission F

First Amendment to Amended and Restated and Restated Bylaws (effective as of November 16, 2021)

Exhibit 3.1 AMTECH SYSTEMS, INC. FIRST AMENDMENT TO AMENDED AND RESTATED BYLAWS (Effective November 16, 2021) THIS FIRST AMENDMENT TO AMENDED AND RESTATED BYLAWS (this ?Amendment?) of Amtech Systems, Inc., an Arizona corporation (the ?Corporation?), dated November 16, 2021, amends the Amended and Restated Bylaws of the Company (the ?Bylaws?) as set forth below. 1. Capitalized terms not otherwise d

Powers of Attorney

EX-24 5 asys-ex24.htm EX-24 Exhibit 24 POWER OF ATTORNEY KNOW ALL MEN BY THESE PRESENTS, THAT EACH PERSON WHOSE SIGNATURE APPEARS BELOW CONSTITUTES AND APPOINTS MICHAEL WHANG AND LISA D. GIBBS, AND EACH OF THEM, HIS TRUE AND LAWFUL ATTORNEYS-IN-FACT AND AGENTS, WITH FULL POWER OF SUBSTITUTION AND RESUBSTITUTION, FOR HIM AND IN HIS NAME, PLACE AND STEAD, IN ANY AND ALL CAPACITIES, TO SIGN AMTECH SY

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 17, 2021 Amtech Systems, Inc. (Exact name of Registrant as Specified in Its Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission F

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended: September 30, 2021 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number: 0-11412 AMTECH SYSTEMS

Amtech Reports Fourth Quarter and Fiscal 2021 Results

EX-99.1 2 asys-ex991.htm EX-99.1 EXHIBIT 99.1 Amtech Reports Fourth Quarter and Fiscal 2021 Results TEMPE, Ariz., November 17, 2021 - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power devices, analog and discret

Description of Capital Stock

Exhibit 4.1 DESCRIPTION OF THE REGISTRANT?S SECURITIES REGISTERED PURSUANT TO SECTION 12 OF THE SECURITIES EXCHANGE ACT OF 1934 Amtech Systems, Inc. (?Amtech,? ?we,? ?our? or ?us?) has one class of securities registered under Section 12 of the Securities Exchange Act of 1934, as amended: our common stock. DESCRIPTION OF CAPITAL STOCK The following summary of the terms of our capital stock is based

Subsidiaries of the Registrant

Exhibit 21.1 AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES SUBSIDIARIES OF THE REGISTRANT Name Jurisdiction in which incorporated Bruce Technologies, Inc State of Massachusetts BTU Europe Ltd. United Kingdom BTU International, Inc. State of Delaware BTU Ltd. (Shanghai) China BTU Overseas, Ltd. State of Delaware BTU Overseas (Shanghai) Co., Ltd China Intersurface Dynamics, Inc. State of Connecticut P.R

Amtech Systems, Inc. Appoints New Member to Board of Directors

EXHIBIT 99.1 Amtech Systems, Inc. Appoints New Member to Board of Directors TEMPE, Ariz., August 12, 2021 - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power devices, analog and discrete devices, electronic asse

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): August 12, 2021 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or other jurisdiction of incorporation) (Commission File Nu

Amtech Reports Third Quarter Fiscal 2021 Results

EXHIBIT 99.1 Amtech Reports Third Quarter Fiscal 2021 Results TEMPE, Ariz., August 4, 2021 - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power devices, analog and discrete devices, electronic assemblies and ligh

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ? QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: June 30, 2021 OR ? TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYST

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): August 4, 2021 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or other jurisdiction of incorporation) (Commission File Num

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD SPECIALIZED DISCLOSURE REPORT AMTECH SYSTEMS, INC. (Exact name of the registrant as specified in its charter)

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD SPECIALIZED DISCLOSURE REPORT AMTECH SYSTEMS, INC. (Exact name of the registrant as specified in its charter) Arizona 000-11412 86-0411215 (State or other jurisdiction of incorporation or organization) (Commission File Number) (IRS Employer Identification No.) 131 S. Clark Drive, Tempe, Arizona 85281 (Address of princi

Conflict Minerals Report for the reporting period from January 1, 2020 to December 31, 2020 as required by Items 1.01 and 1.02 of this Form SD.

Exhibit 1.01 Conflict Minerals Report For Reporting Period from January 1, 2020 to December 31, 2020 1. Introduction This Conflict Minerals Report (this ?Report?) of Amtech Systems, Inc. (the ?Company?, ?Amtech?, ?our?, ?us?, or ?we?) has been prepared pursuant to Rule 13p-1 and Form SD (the ?Rule?) promulgated under the Securities Exchange Act of 1934, as amended, for the reporting period from Ja

Amtech Reports Second Quarter Fiscal 2021 Results

EXHIBIT 99.1 Amtech Reports Second Quarter Fiscal 2021 Results TEMPE, Ariz., May 5, 2021 - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power devices, analog and discrete devices, electronic assemblies and light-

Quarterly Report - 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ? QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: March 31, 2021 OR ? TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYS

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): May 5, 2021 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or other jurisdiction of incorporation) (Commission File Number

Regulation FD Disclosure, Financial Statements and Exhibits

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of The Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): April 26, 2021 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or other jurisdiction of incorporation) (Commission File Num

Financial Statements and Exhibits, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): April 12, 2021 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File Num

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Notice of Delisting or Failure to Satisfy a Continued Listing Rule or Standard; Transfer of Listing, Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of The Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 23, 2021 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or other jurisdiction of incorporation) (Commission File Num

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, DC 20549 SCHEDULE 13D THE SECURITIES EXCHANGE ACT OF 1934 (Amendment No. 1)*

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, DC 20549 SCHEDULE 13D THE SECURITIES EXCHANGE ACT OF 1934 (Amendment No.

SCHEDULE 13G

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 2 )* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 31, 2020 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sch

Quarterly Report - 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: December 31, 2020 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH

Financial Statements and Exhibits, Results of Operations and Financial Condition, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): February 9, 2021 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File N

Amtech Reports First Quarter Fiscal 2021 Results

EXHIBIT 99.1 Amtech Reports First Quarter Fiscal 2021 Results TEMPE, Ariz., February 11, 2021 - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power devices, analog and discrete devices, electronic assemblies and l

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934

SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 Name of issuer: Amtech Systems Inc. Title of Class of Securities: Common Stock CUSIP Number: 032332504 Date of Event Which Requires Filing of this Statement: December 31, 2020 Check the appropriate box to designate the rule pursuant to which this Schedule is filed: ☒ Rule 13d-1(b) ☐ Rul

ASYS 13GA FILING

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 2 )* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 31, 2020 (Date of Event which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sch

- DEF 14A

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ☑ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (a

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits - 8-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): December 14, 2020 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

Amtech Reports Fourth Quarter Fiscal 2020 Results

EXHIBIT 99.1 Amtech Reports Fourth Quarter Fiscal 2020 Results TEMPE, Ariz., November 19, 2020 - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power devices, analog and discrete devices, electronic assemblies and

Financial Statements and Exhibits, Results of Operations and Financial Condition - 8-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): November 19, 2020 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

Description of Capital Stock

Exhibit 4.2 DESCRIPTION OF THE REGISTRANT’S SECURITIES REGISTERED PURSUANT TO SECTION 12 OF THE SECURITIES EXCHANGE ACT OF 1934 Amtech Systems, Inc. (“Amtech,” “we,” “our” or “us”) has one class of securities registered under Section 12 of the Securities Exchange Act of 1934, as amended: our common stock. DESCRIPTION OF CAPITAL STOCK The following summary of the terms of our capital stock is based

Subsidiaries of the Registrant

Exhibit 21.1 AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES SUBSIDIARIES OF THE REGISTRANT Name Jurisdiction in which incorporated Bruce Technologies, Inc State of Massachusetts BTU Europe Ltd. State of Delaware BTU International, Inc. State of Delaware BTU Ltd. (Shanghai) State of Delaware BTU Overseas, Ltd. State of Delaware BTU Overseas (Shanghai) Co., Ltd State of Delaware P.R. Hoffman Machine Prod

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended: September 30, 2020 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number: 0-11412 AMTECH SYSTEMS

Powers of Attorney

Exhibit 24 POWER OF ATTORNEY KNOW ALL MEN BY THESE PRESENTS, THAT EACH PERSON WHOSE SIGNATURE APPEARS BELOW CONSTITUTES AND APPOINTS MICHAEL WHANG AND LISA D.

Amended and Restated Bylaws of Amtech Systems, Inc., dated as of September 23, 2020

Exhibit 3.1 AMENDED AND RESTATED BYLAWS OF AMTECH SYSTEMS, INC. an Arizona corporation As Amended and Restated Effective as of September 23, 2020 I. CORPORATION ARTICLES 1.1 References to Articles. Any reference herein made to the Articles of Amtech Systems, Inc. (the “Corporation”) will be deemed to refer to its Articles of Incorporation (the “Articles”) and all amendments thereto as at any given

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): September 23, 2020 Amtech Systems

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): September 23, 2020 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

Amtech Group Code of Ethics and Business Conduct (effective as of September 23, 2020)

Exhibit 14.1 Amtech Group Code of Ethics and Business Conduct “Integrity and Values” Introduction The Board of Directors of Amtech Systems, Inc. (together with its subsidiaries, “Amtech Group”) has adopted this Code of Ethics and Business Conduct (the “Code”) in order to: • promote honest and ethical conduct, including the ethical handling of actual or apparent conflicts of interest; • promote ful

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): August 6, 2020 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File Num

Quarterly Report - 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: June 30, 2020 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYST

Amtech Reports Third Quarter Fiscal 2020 Results

EXHIBIT 99.1 Amtech Reports Third Quarter Fiscal 2020 Results TEMPE, Ariz., August 6, 2020 - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power chips, electronic assemblies and light-emitting diodes (LEDs), today

Conflict Minerals Report for the reporting period from January 1, 2019 to December 31, 2019 as required by Items 1.01 and 1.02 of this Form SD.

Exhibit 1.01 Conflict Minerals Report For Reporting Period from January 1, 2019 to December 31, 2019 1. Introduction This Conflict Minerals Report (this “Report”) of Amtech Systems, Inc. (the “Company”, “Amtech”, “our”, “us”, or “we”) has been prepared pursuant to Rule 13p-1 and Form SD (the “Rule”) promulgated under the Securities Exchange Act of 1934, as amended, for the reporting period from Ja

- SD

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD SPECIALIZED DISCLOSURE REPORT AMTECH SYSTEMS, INC. (Exact name of the registrant as specified in its charter) Arizona 000-11412 86-0411215 (State or other jurisdiction of incorporation or organization) (Commission File Number) (IRS Employer Identification No.) 131 S. Clark Drive, Tempe, Arizona 85281 (Address of princi

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): May 7, 2020 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File Number

Amtech Announces Board Appointments

EXHIBIT 99.1 Amtech Announces Board Appointments TEMPE, Ariz., May 7, 2020 - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power chips, electronic assemblies and light-emitting diodes (LEDs), today announced that

Amtech Reports Second Quarter Fiscal 2020 Results

EXHIBIT 99.1 Amtech Reports Second Quarter Fiscal 2020 Results TEMPE, Ariz., May 7, 2020 - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power chips, electronic assemblies and light-emitting diodes (LEDs), today r

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): May 4, 2020 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File Number

Quarterly Report - 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: March 31, 2020 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYS

Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): March 4, 2020 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File Numb

ASYS / Amtech Systems, Inc. / Pacific Ridge Capital Partners, LLC - ASYS 13G AMENDMENT NO 1 Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 1 )* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 31, 2019 (Date of Event which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sch

ASYS / Amtech Systems, Inc. / Pacific Ridge Capital Partners, LLC Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. )* Amtech Systems Inc (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 31, 2019 (Date of Event which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sched

ASYS / Amtech Systems, Inc. / DIMENSIONAL FUND ADVISORS LP - SCHEDULE 13G/A Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 1)* AMTECH SYSTEMS INC (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 31, 2019 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sche

Amtech Reports First Quarter Fiscal 2020 Results

EXHIBIT 99.1 Amtech Reports First Quarter Fiscal 2020 Results TEMPE, Ariz., February 6, 2020 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power chips, electronic assemblies and light-emitting diode

Quarterly Report - 10-Q

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: December 31, 2019 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Results of Operations and Financial Condition, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): February 4, 2020 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File N

ASYS / Amtech Systems, Inc. / Privet Fund LP - SC 13D/A Activist Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13D Under the Securities Exchange Act of 1934 (Amendment No. 1)* Amtech Systems, Inc. (Name of Issuer) Common Stock, par value $0.01 per share (Title of Class of Securities) 032332504 (CUSIP Number) Privet Fund LP Attn: Ryan Levenson 79 West Paces Ferry Road Suite 200B Atlanta, GA 30305 With a copy to: Rick Miller Bry

Amtech Announces Sale of Solar Business and Changes to Executive Team Full Focus Now on Growth Strategies for its Semiconductor and Silicon Carbide Businesses

EX-99.1 2 asys-ex9916.htm EX-99.1 Exhibit 99.1 Amtech Announces Sale of Solar Business and Changes to Executive Team Full Focus Now on Growth Strategies for its Semiconductor and Silicon Carbide Businesses TEMPE, Ariz., January 28, 2020 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Completion of Acquisition or Disposition of Assets

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): January 22, 2020 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File N

Amendment to the Non-Employee Directors Stock Option Plan, effective March 4, 2020

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 Filed by the Registrant ☑ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (as permitted by Ru

ASYS / Amtech Systems, Inc. / HARBERT MICROCAP PARTNERS FUND, LP Activist Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, DC 20549 SCHEDULE 13D THE SECURITIES EXCHANGE ACT OF 1934 (Amendment No.

ASYS / Amtech Systems, Inc. / Privet Fund LP - SCHEDULE 13D Activist Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13D Under the Securities Exchange Act of 1934 Amtech Systems, Inc. (Name of Issuer) Common Stock, par value $0.01 per share (Title of Class of Securities) 032332504 (CUSIP Number) Privet Fund LP Attn: Ryan Levenson 79 West Paces Ferry Road Suite 200B Atlanta, GA 30305 With a copy to: Rick Miller Bryan Cave Leighton Pa

JOINT FILING AGREEMENT

EX-99.1 2 tm1923776d1ex99-1.htm EXHIBIT 99.1 Exhibit 99.1 JOINT FILING AGREEMENT In accordance with Rule 13d-1(k) under the Securities Exchange Act of 1934, as amended (the “Act”), the undersigned hereby agree to the joint filing on behalf of each of them of a statement on Schedule 13D and any amendments thereto with respect to the common stock of Amtech Systems, Inc. and agree that this Joint Fil

Current Report

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): November 19, 2019 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

Description of Capital Stock

Exhibit 4.2 DESCRIPTION OF THE REGISTRANT’S SECURITIES REGISTERED PURSUANT TO SECTION 12 OF THE SECURITIES EXCHANGE ACT OF 1934 Amtech Systems, Inc. (“Amtech,” “we,” “our” or “us”) has one class of securities registered under Section 12 of the Securities Exchange Act of 1934, as amended: our common stock. DESCRIPTION OF CAPITAL STOCK The following summary of the terms of our capital stock is based

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): November 21, 2019 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

Subsidiaries of the Registrant

Exhibit 21.1 AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES SUBSIDIARIES OF THE REGISTRANT Name Jurisdiction in which incorporated Bruce Technologies, Inc State of Massachusetts Bruce Technologies Europe GmbH Federal Republic of Germany BTU Europe Ltd. State of Delaware BTU International, Inc. State of Delaware BTU Ltd. (Shanghai) State of Delaware BTU Overseas, Ltd. State of Delaware BTU Overseas (Sha

Powers of Attorney

Exhibit 24 POWER OF ATTORNEY KNOW ALL MEN BY THESE PRESENTS, THAT EACH PERSON WHOSE SIGNATURE APPEARS BELOW CONSTITUTES AND APPOINTS JONG S.

Amtech Reports Fourth Quarter and Fiscal 2019 Results

EXHIBIT 99.1 Amtech Reports Fourth Quarter and Fiscal 2019 Results TEMPE, Ariz., November 21, 2019 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer polishing, and related consumables used in fabricating semiconductor devices, such as silicon carbide (SiC) and silicon power chips, electronic assemblies and light-emitting

Annual Report - 10-K

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended: September 30, 2019 OR ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number: 0-11412 AMTECH SYSTEMS

Financial Statements and Exhibits, Results of Operations and Financial Condition

8-K 1 a8kearningsrelease-063019.htm 8-K 3Q19 ASYS EARNINGS RELEASE UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): August 8, 2019 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215

Amtech Reports Third Quarter Fiscal 2019 Results

EXHIBIT 99.1 Amtech Reports Third Quarter Fiscal 2019 Results TEMPE, Ariz., August 8, 2019 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing, related consumables, and wafer handling systems used in fabricating semiconductor devices, silicon carbide (SiC) and silicon power chips, electronic assemblies, light-emitting diodes (LEDs),

ASYS / Amtech Systems, Inc. 10-Q - Quarterly Report - 10-Q ASYS 3Q19

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) [X] QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: June 30, 2019 OR [ ] TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Numbe

ASYS / Amtech Systems, Inc. SD - - ASYS 2018 FORM SD

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AMTECH SYSTEMS, INC. (Exact name of registrant as specified in its charter) Arizona 000-11412 86-0411215 (State or other jurisdiction (Commission (IRS Employer of incorporation or organization) File Number) Identification No.) 131 S. Clark Drive, Tempe, Arizona 85281 (Address of Principal

Conflict Minerals Report for the reporting period from January 1, 2018 to December 31, 2018 as required by Items 1.01 and 1.02 of this Form SD.

Exhibit 1.01 Conflict Minerals Report For Reporting Period from January 1, 2018 to December 31, 2018 1. Introduction This Conflict Minerals Report (this “Report”) of Amtech Systems, Inc. (the “Company”, “Amtech”, “our”, “us”, or “we”) has been prepared pursuant to Rule 13p-1 and Form SD (the “Rule”) promulgated under the Securities Exchange Act of 1934, as amended, for the reporting period from Ja

Amtech Reports Second Quarter Fiscal 2019 Results

EXHIBIT 99.1 Amtech Reports Second Quarter Fiscal 2019 Results TEMPE, Ariz., May 9, 2019 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer handling automation, and related consumables used in fabricating semiconductor devices, light-emitting diodes (LEDs), silicon carbide (SiC) and silicon power chips and solar cells, to

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): May 9, 2019 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File Number

ASYS / Amtech Systems, Inc. 10-Q Quarterly Report 10-Q ASYS 2Q19

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) [X] QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: March 31, 2019 OR [ ] TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Numb

Amtech Systems Announces Plan to Divest Solar Businesses and Focus Solely on the Profitable Growth Opportunities in Its Semiconductor Businesses

EX-99.1 2 pressreleasedatedapril32019.htm EXHIBIT 99.1 Amtech Systems Announces Plan to Divest Solar Businesses and Focus Solely on the Profitable Growth Opportunities in Its Semiconductor Businesses TEMPE, Ariz., April 3, 2019 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer handling automation, and related consumables

Financial Statements and Exhibits, Costs Associated with Exit or Disposal Activities

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): March 28, 2019 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File Num

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): March 6, 2019 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File Numb

ASYS / Amtech Systems, Inc. / DIMENSIONAL FUND ADVISORS LP - SCHEDULE 13G Passive Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. )* AMTECH SYSTEMS INC (Name of Issuer) Common Stock (Title of Class of Securities) 032332504 (CUSIP Number) December 31, 2018 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sched

Amtech Reports First Quarter Fiscal 2019 Results

EXHIBIT 99.1 Amtech Reports First Quarter Fiscal 2019 Results TEMPE, Ariz., February 7, 2019 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer handling automation, and related consumables used in fabricating semiconductor devices, light-emitting diodes, or LEDs, silicon carbide (SiC) and silicon power chips and solar cel

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): February 7, 2019 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File N

Separation Agreement and General Release of All Claims between Amtech Systems, Inc. and Fokko Pentinga dated November 28, 2018

EX-10.1 2 separationagreementxpenti.htm EXHIBIT 10.1 Exhibit 10.1 SEPARATION AGREEMENT AND GENERAL RELEASE OF ALL CLAIMS This Separation Agreement and General Release of All Claims (“Separation Agreement”) is made by and between Amtech Systems, Inc., an Arizona corporation (the “Company”), and Fokko Pentinga (“Executive”) with respect to the following facts: A. Executive is currently employed by t

Letter Agreement between Amtech Systems, Inc. and Fokko Pentinga dated December 28, 2018

EX-10.2 3 letteragreementxpentinga.htm EXHIBIT 10.2 Exhibit 10.2 Amtech Systems, Inc. 131 South Clark Drive Tempe, Arizona 85281 December 28, 2018 Fokko Pentinga RE: Separation Agreement dated December 6, 2018, between Amtech Systems, Inc. (the “Company”) and Fokko Pentinga (the “Separation Agreement”). Dear Mr. Pentinga: This letter agreement shall serve to reflect the agreement between you and t

ASYS / Amtech Systems, Inc. ASYS 1Q19 10-Q (Quarterly Report)

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) [X] QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: December 31, 2018 OR [ ] TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File N

Amendment to 2007 Employee Stock Incentive Plan of Amtech Systems, Inc., effective March 6, 2019

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 SCHEDULE 14A (Rule 14a-101) SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 Filed by the Registrant R Filed by a Party other than the Registrant o Check the appropriate box: o Preliminary Proxy Statement o Confidential, for Use of the Commission Only (as permitted by Ru

ASYS / Amtech Systems, Inc. 2018 ASYS 10-K (Annual Report)

UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K (Mark One) [X] ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended: September 30, 2018 OR [ ] TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Number: 0-11412 AMTECH SYS

Subsidiaries of the Registrant

Exhibit 21.1 AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES SUBSIDIARIES OF THE REGISTRANT Name Jurisdiction in which incorporated Tempress Systems, Inc. State of Texas Tempress Group Holding BV The Netherlands Tempress Holdings BV The Netherlands Tempress Systems BV The Netherlands Tempress Manufacturing BV The Netherlands Tempress Engineering BV The Netherlands Tempress Onroerend Goed BV The Netherla

Powers of Attorney

Exhibit 24 POWER OF ATTORNEY KNOW ALL MEN BY THESE PRESENTS, THAT EACH PERSON WHOSE SIGNATURE APPEARS BELOW CONSTITUTES AND APPOINTS JONG S.

Financial Statements and Exhibits, Results of Operations and Financial Condition, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): November 27, 2018 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

Amtech Reports Fourth Quarter and Fiscal 2018 Results

EXHIBIT 99.1 Amtech Reports Fourth Quarter and Fiscal 2018 Results TEMPE, Ariz., November 29, 2018 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a manufacturer of capital equipment, including thermal processing and wafer handling automation, and related consumables used in fabricating semiconductor devices, light-emitting diodes, or LEDs, silicon carbide (SiC) and silicon power chips and sol

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): November 28, 2018 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File

ASYS / Amtech Systems, Inc. / PITON CAPITAL PARTNERS LLC - SCHEDULE 13D AMENDMENT NO. 4 Activist Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13D Under the Securities Exchange Act of 1934 (Amendment No. 4)* AMTECH SYSTEMS, INC. (Name of Issuer) Common Stock, $0.01 Par Value Per Share (Title of Class of Securities) 032332504 (CUSIP Number) Garrett Lynam Kokino LLC 201 Tresser Boulevard, 3rd Floor Stamford, CT 06901 (203) 595-4552 (Name, Address and Telephone

Amtech Reports Third Quarter Fiscal 2018 Results

EXHIBIT 99.1 Amtech Reports Third Quarter Fiscal 2018 Results TEMPE, Ariz., August 9, 2018 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a global manufacturer and supplier of advanced thermal processing and polishing equipment and related consumables to the semiconductor / electronics, power IC businesses, solar, and advanced lighting markets, today reported results for its third quarter end

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): August 9, 2018 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File Num

ASYS / Amtech Systems, Inc. ASYS 3Q18 10-Q (Quarterly Report)

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) [X] QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: June 30, 2018 OR [ ] TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Numbe

ASYS / Amtech Systems, Inc. / Schreyer Leslie J - SCHEDULE 13D AMENDMENT NO. 3 Activist Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13D Under the Securities Exchange Act of 1934 (Amendment No. 3)* AMTECH SYSTEMS, INC. (Name of Issuer) Common Stock, $0.01 Par Value Per Share (Title of Class of Securities) 032332504 (CUSIP Number) Garrett Lynam Kokino LLC 201 Tresser Boulevard, 3rd Floor Stamford, CT 06901 (203) 595-4552 (Name, Address and Telephone

ASYS / Amtech Systems, Inc. ASYS 2017 CONFLICT MINERALS REPORT

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AMTECH SYSTEMS, INC. (Exact name of registrant as specified in its charter) Arizona 000-11412 86-0411215 (State or other jurisdiction (Commission (IRS Employer of incorporation or organization) File Number) Identification No.) 131 S. Clark Drive, Tempe, Arizona 85281 (Address of Principal

Conflict Minerals Report for the reporting period from January 1, 2017 to December 31, 2017 as required by Items 1.01 and 1.02 of this Form SD.

Exhibit 1.01 Conflict Minerals Report For Reporting Period from January 1, 2017 to December 31, 2017 1. Introduction This Conflict Minerals Report (this “Report”) of Amtech Systems, Inc. (the “Company”, “Amtech”, “our”, “us”, or “we”) has been prepared pursuant to Rule 13p-1 and Form SD (the “Rule”) promulgated under the Securities Exchange Act of 1934, as amended, for the reporting period from Ja

Submission of Matters to a Vote of Security Holders

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): May 11, 2018 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File Numbe

Financial Statements and Exhibits, Results of Operations and Financial Condition

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): May 10, 2018 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File Numbe

Amtech Reports Second Quarter Fiscal 2018 Results

EXHIBIT 99.1 Amtech Reports Second Quarter Fiscal 2018 Results TEMPE, Ariz., May 10, 2018 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a global manufacturer and supplier of production equipment and related supplies for the solar, semiconductor and LED markets, today reported results for its second quarter ended March 31, 2018. Second Quarter Fiscal 2018 Financial and Operational Highlights:

ASYS / Amtech Systems, Inc. ASYS 2Q18 10-Q (Quarterly Report)

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) [X] QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: March 31, 2018 OR [ ] TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File Numb

ASYS / Amtech Systems, Inc. DEF 14A

DEFINITIVE PROXY STATEMENT SCHEDULE 14A (Rule 14a-101) INFORMATION REQUIRED IN PROXY STATEMENT SCHEDULE 14A INFORMATION Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No.

Financial Statements and Exhibits, Other Events

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): March 28, 2018 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commission File Num

Amtech Systems Announces Stock Repurchase Program

EXHIBIT 99.1 Amtech Systems Announces Stock Repurchase Program TEMPE, Ariz., April 2, 2018 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a global supplier of production equipment and related supplies for the solar, semiconductor, and LED markets, today announced that its Board of Directors has authorized a new stock repurchase program of up to $4 million of the company’s outstanding common s

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

8-K 1 march2018vanderwansem.htm 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): March 14, 2018 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of

Amtech Reports First Quarter Fiscal 2018 Results

Exhibit EXHIBIT 99.1 Amtech Reports First Quarter Fiscal 2018 Results TEMPE, Ariz., February 8, 2018 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a global manufacturer and supplier of production equipment and related supplies for the solar, semiconductor and LED markets, today reported results for its first quarter ended December 31, 2017 . First Quarter Fiscal 2018 Financial and Operationa

Financial Statements and Exhibits, Results of Operations and Financial Condition

Document UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): February 8, 2018 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commissi

ASYS / Amtech Systems, Inc. 10-Q 1Q18 QUARTERLY REPORT (Quarterly Report)

Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) [X] QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended: December 31, 2017 OR [ ] TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission File N

ASYS / Amtech Systems, Inc. 10-K/A FISCAL YEAR 2017 (Annual Report)

Document UNITED STATES SECURITIES AND EXCHANGE COMMISSION WASHINGTON, D.C. 20549 FORM 10-K/A (Amendment No. 1) (Mark One) [X] ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended: September 30, 2017 OR [ ] TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission Fi

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

Document UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): January 11, 2018 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commissi

Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers

Document UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): January 4, 2018 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commissio

Other Events

Document UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): December 13, 2017 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commiss

ASYS / Amtech Systems, Inc. / Schreyer Leslie J - SCHEDULE 13D AMENDMENT NO. 2 Activist Investment

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13D Under the Securities Exchange Act of 1934 (Amendment No. 2)* AMTECH SYSTEMS, INC. (Name of Issuer) Common Stock, $0.01 Par Value Per Share (Title of Class of Securities) 032332504 (CUSIP Number) Garrett Lynam Kokino LLC 201 Tresser Boulevard, 3rd Floor Stamford, CT 06901 (203) 595-4552 (Name, Address and Telephone

Financial Statements and Exhibits, Results of Operations and Financial Condition

Document UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): November 20, 2017 Amtech Systems, Inc. (Exact Name of Registrant as Specified in Charter) Arizona 000-11412 86-0411215 (State or Other Jurisdiction of Incorporation) (Commiss

Amtech Reports Fourth Quarter and Fiscal 2017 Results

Exhibit EXHIBIT 99.1 Amtech Reports Fourth Quarter and Fiscal 2017 Results TEMPE, Ariz., November 20, 2017 /PRNewswire/ - Amtech Systems, Inc. (NASDAQ: ASYS), a global supplier of production equipment and related supplies for the solar, semiconductor, and LED markets, today reported results for its fourth quarter and fiscal year ended September 30, 2017 . Fourth Quarter Fiscal 2017 Financial and O

POWER OF ATTORNEY

Exhibit 24 POWER OF ATTORNEY KNOW ALL MEN BY THESE PRESENTS, THAT EACH PERSON WHOSE SIGNATURE APPEARS BELOW CONSTITUTES AND APPOINTS JONG S.

AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES SUBSIDIARIES OF THE REGISTRANT

Exhibit 21.1 AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES SUBSIDIARIES OF THE REGISTRANT Name Jurisdiction in which incorporated Tempress Systems, Inc. State of Texas Tempress Group Holding BV The Netherlands Tempress Holdings BV The Netherlands Tempress Systems BV The Netherlands Tempress Manufacturing BV The Netherlands Tempress Engineering BV The Netherlands Tempress Onroerend Goed BV The Netherla

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